Plasma cleaning machine, also known as plasma surface treatment machine, is a new high-tech technology, using plasma to achieve the effect that conventional cleaning methods cannot achieve. Plasma is a state of matter, also known as the fourth state of matter, which does not belong to the common three state of solid-liquid gas. Applying enough energy to the gas to dissociate it becomes a plasma state. The "active" components of plasma include: ions, electrons, atoms, active groups, excited Nuclides (metastable), photons, etc. Plasma cleaning machine is to use the properties of these active components to treat the sample surface, so as to achieve the purpose of cleaning, coating and so on.
There are 8 application solutions for common problems of plasma cleaning machine (Figure 2). Vacuum plasma cleaning machine is widely used in all walks of life. Shenzhen Fangrui Technology Co., Ltd. summarizes 8 application solutions for plasma cleaning machine:
1. Surface cleaning solution: in the vacuum plasma chamber, the high-energy disordered plasma is produced by RF power supply under certain pressure, and the cleaned product surface is bombarded by plasma to achieve the cleaning purpose.
2. The surface activation solution enhances the surface energy, hydrophilicity, adhesion and adhesion of the object after the plasma surface treatment.
3. Surface etching solution: the material surface is selectively etched by reactive gas plasma, the etched material is transformed into gas phase and discharged by vacuum pump, the micro specific surface area of the treated material increases and has good hydrophilicity.
4. After the nano coating solution is treated by the plasma cleaner, the nano coating is formed by the plasma guided polymerization. All kinds of materials are hydrophobic (hydrophobic), hydrophilic (hydrophilic), lipophilic (anti lipophilic) and lipophilic (anti lipophilic).
5. The PBC manufacturing solution actually involves the process of plasma etching. The plasma surface processor can remove the surface colloid by plasma bombarding the object surface. PCB manufacturers use the etching system of plasma cleaning machine to decontaminate and etch to take away the insulation in the borehole, and ultimately improve the product quality.
6. The application of semiconductor / LED solution plasma in semiconductor industry is based on the fine components and connecting wires of integrated circuit, so it is easy to be polluted by dust or organic matters in the process, which is extremely easy to cause chip damage and short circuit. In order to eliminate the problems in the process, isoseparation is introduced in the subsequent process. In order to protect our products better, we use plasma surface treatment equipment to remove surface organic matters and impurities without damaging the performance of wafer surface. In the process of LED epoxy injection, pollutants will lead to high bubble forming rate, resulting in low product quality and service life. Therefore, avoiding bubble forming in the sealing process is also a concern. After RF plasma cleaning, the chip and substrate will be more closely combined with colloid, the formation of bubbles will be greatly reduced, and the heat dissipation rate and light emission rate will be significantly improved. The plasma cleaning machine will be applied to the metal surface for oil removal and cleaning.
7. TSP / OLED solution this involves the cleaning function of the plasma cleaning machine. In terms of TSP, the cleaning of the main process of the touch screen can improve the adhesion / coating force of OCA / OCR, lamination, ACF, AR / AF coating and other processes. In order to remove bubbles / foreign matters, through the application of various atmospheric pressure and other ionic forms, the uniform atmospheric pressure plasma discharge of various glasses and films can make the surface No damage.
8. Vacuum plasma spraying solution because of the high energy density in vacuum plasma, in fact, it can transform all powder materials with stable melting phase into dense and firmly attached spraying layer, and the melting degree of spraying powder particles at the instant of striking the workpiece surface plays a decisive role in the quality of spraying layer. Vacuum plasma spraying technology improves the efficiency of modern multifunctional coating equipment.